Atomic layer deposition of alternative glass microchannel plates

Nano-oxide thin films deposited via atomic layer deposition on microchannel plates

Microchannel plate (MCP) as a key part is a kind of electron multiplied device applied in many scientific fields. Oxide thin films such as zinc oxide doped with aluminum oxide (ZnO:Al2O3) as conductive layer and pure aluminum oxide (Al2O3) as secondary electron emission (SEE) layer were prepared in the pores of MCP via atomic layer deposition (ALD) which is a method that can precisely control t...

Atomic Layer Deposition of TiO

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Microchannel Plates

A typical MCP consists of about 10,000,000 closely packed channels of common diameter which are formed by drawing, etching, or firing in hydrogen, a lead glass matrix. Typically, the diameter of each channel is ~ 10 microns. Each channel acts as an independent, continuous dinode photomultiplier. In astronomy, and in the many other fields that use MCPs, the detectors are generally used for disto...

Atomic layer deposition: an overview.

Atomic layer deposition of ZnS nanotubes.

We report on the growth of high-aspect-ratio (approximately > 300) zinc sulfide nanotubes with variable, precisely tunable, wall thicknesses and tube diameters into highly ordered pores of anodic alumina templates by atomic layer deposition (ALD) at temperatures as low as 75 degrees C. Various characterization techniques are employed to gain information on the composition, morphology and crysta...